Unsupervised algorithms for the automatic classification of EWS maps: a comparison

Di Palma, F.   De Nicolao, G.   Donzelli, O.M.   Miraglia, G.  
Pavia Univ., Italy;

This paper appears in: Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Publication Date: 13-15 Sept. 2005
On page(s): 253- 256
ISSN:
ISBN: 0-7803-9143-8
INSPEC Accession Number: 8624914
Digital Object Identifier: 10.1109/ISSM.2005.1513349